METHOD FOR TEACHING CARRIER MEANS, STORAGE MEDIUM, AND SUBSTRATE PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To achieve more accurate and facilitated positioning of a carrier onto a placing stage in a substrate processing apparatus configured for placing the carrier storing multiple sheets of wafers therein on the placing stage by using a carrier arm.;SOLUTION: Before the carrier is carried, a carrier tool having the same shape as that of the carrier is held at a predetermined position on the carrier arm above the placing stage where an opening is formed, wherein the carrier tool has a camera central position of an imaging region of which coincides with a center of the opening when the carrier tool is accurately positioned at an ideal position on the placing stage. Then, this carrier tool is brought near the ideal position of the placing stage by moving the carrier arm, and the camera images a region including the opening. Then, a deviation amount between the center of the opening and the central position of the imaging region of the camera in a horizontal direction is calculated. Then, the carrier arm position is corrected by using this deviation amount as the correction amount and the carrier is placed on the placing stage.;COPYRIGHT: (C)2009,JPO&INPIT