Method for teaching carrier means, storage medium and substrate processing apparatus

摘要

The present invention is intended to achieve more accurate and facilitated positioning of a carrier onto a table, in a substrate processing apparatus configured for placing the carrier storing multiple sheets of wafers therein, on the table, by using a carrier arm. Before the carrier is actually carried by the carrier arm, a carrier jig having the same shape as the carrier is held by a holding part provided to the carrier arm. The carrier jig is provided with a camera, such that a central position of a region of an image taken by the camera will be coincident with a central position of an opening formed in the table, if the carrier jig is accurately located in an ideal position above the table. First, the carrier arm is actuated to move the holding part of the carrier arm to a preset lowering start position. Then, the image of the region including the opening is taken by the camera. Thereafter, a distance between the central position of the opening and the central position of the region of the image taken by the camera is calculated, so as to obtain an amount of a positional shift, in a horizontal direction, between the preset lowering start position and the ideal position. Consequently, the lowering start position of the holding part is corrected, by using the so-obtained amount of the positional shift as a correction value. Finally, the carrier is placed on the table, based on the so-corrected lowering start position.