METHOD AND DEVICE FOR ADJUSTING POSITION OF OPTICAL SYSTEM TO BE INSPECTED IN SPOT CHARACTERISTIC MEASUREMENT

摘要

PROBLEM TO BE SOLVED: To automate and perform highly accurately in a short time, position adjustment of an optical system to be inspected when performing spot characteristic measurement.;SOLUTION: The position of the optical system to be inspected to a measuring device is moved successively, and an image of a light beam is imaged in each movement, and a brightness integrated value of the whole image and brightness integrated values classified by each domain in the image are determined. A first determination processing for determining whether the determined brightness integrated value of the whole image becomes higher than a first threshold or not, and a second determination processing for comparing each largeness of the brightness integrated values classified by each domain, and determining whether a difference between the maximum brightness integrated value and the minimum brightness integrated value becomes higher than a second threshold or not, are performed, and a first movement processing based on a scattered light pattern and the second movement processing based on the brightness integrated value are performed corresponding to the determination result.;COPYRIGHT: (C)2009,JPO&INPIT