METHOD OF CREATING PHOTOMASK LAYOUT, COMPUTER READABLE RECORDING MEDIUM STORING PROGRAMMED INSTRUCTION FOR EXECUTING THE METHOD, AND MASK IMAGING SYSTEM

摘要

PPROBLEM TO BE SOLVED: To provide a method of creating a photomask layout, a computer readable recording medium storing programmed instructions for executing the above method, and a mask imaging system. PSOLUTION: The method for creating a photomask layout includes the steps of: providing a first photomask layout including main patterns and sub-resolution assist features (SRAF) patterns; defining a plurality of mesh cells by dividing the first photomask layout into regions; generating a rule based table including correction information for correcting defects in the SRAF patterns for at least one of the plurality of mesh cells; and correcting the SRAF patterns by applying values of the correction information to the SRAF patterns corresponding to each mesh cell. PCOPYRIGHT: (C)2009,JPO&INPIT