ELECTRON BEAM IRRADIATION CONDITION DECISION SUPPORT UNIT AND ELECTRON BEAM TYPE SAMPLE INSPECTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electron beam type sample inspecting device capable of deciding electron beam irradiation conditions in a short time without generating an individual difference by an operator.;SOLUTION: The electronic ray type sample inspecting device that performs irradiation of a sample with electron beams and the detection of electrons emitted from the sample by electron beam irradiation conditions and produces a sample image that the detection signals of electrons correspond to contrast levels and then detects sample defects by contrast levels comprises a first producing support section 17 that produces an equivalent circuit between surfaces of the front and the back of a normal section of a normal object to be inspected of a sample, a second producing support section 17 that produces an equivalent circuit between surfaces of the front and the back of a simulated defect section where it is expected that the inspection object includes a defects, a charged electrostatic potential calculation section 18 that calculates a charged electrostatic potential which is generated by the surfaces of the normal section and the defect section charged by electron beam irradiation conditions, and an alternative support section 19 that selects the electronic ray irradiation condition so that the different potential between charged electrostatic potentials of the normal section and the defect section becomes maximum.;COPYRIGHT: (C)2009,JPO&INPIT