SURFACE POTENTIAL SENSOR UNIT, SURFACE POTENTIAL SENSOR, AND SURFACE POTENTIAL SENSOR ARRAY

摘要

PROBLEM TO BE SOLVED: To provide a surface potential sensor unit capable of acquiring a compacter, high-sensitivity and high-resolution surface potential sensor.;SOLUTION: The surface potential sensor unit includes: a single mode waveguide 2 which is a two-dimensional waveguide having an electro-optical effect, for propagating light in a single mode; a detection electrode 1 and a grounding electrode 3 provided so as to sandwich the single mode waveguide 2 from both surfaces; a polarizer 4 and a VCSEL 5 for introducing polarized light from one end of the single mode waveguide 2; and an optical analyzer 6 and a photodiode 7 for measuring intensity of polarized light emitted from the other end of the single mode waveguide 2. In the unit, a probe 20 facing to or in contact with an object to be measured whose surface potential is to be measured is electrically connected to the detection electrode 1.;COPYRIGHT: (C)2010,JPO&INPIT