METHOD FOR JOINING SILICON CARBIDE CERAMIC MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a method for joining silicon carbide ceramic materials, even in silicon carbide ceramic materials with a complicated shape having pores, grooves or the like, which can obtain a joined body without clogging the pores, grooves or the like by a joining material.;SOLUTION: When the silicon carbide ceramic materials are joined using a silicon-containing brazing filler metal, an oxide film is beforehand deposited on the faces to be joined in the silicon carbide ceramic materials by a heat oxidation process, a CVD process or a plasma oxidation process, and joining is performed in such a manner that a brazing filler metal is interposed between the faces to be joined.;COPYRIGHT: (C)2009,JPO&INPIT