DEFECT RELEVANCE DISPLAYING APPARATUS, SUBSTRATE TESTING APPARATUS, AND DEFECT RELEVANCE DISPLAYING METHOD

摘要

PROBLEM TO BE SOLVED: To easily confirm or analyze relevance between front-surface defect and rear-surface defect.;SOLUTION: A front-surface image 202 of the front surface 101 of a semiconductor wafer 100 and a rear-surface image 201b of the rear-surface 102 that is obtained by mirror-image conversion of the rear-surface image 201a are displayed. A mark for indicating relationship between a front-surface defect 204 and a rear-surface defect 203a (203b) is further displayed based on a relative position of the front-surface defect 204 within the displayed front-surface image 202 and a relative position of the rear-surface defect 203b within the displayed rear-surface image 201b.;COPYRIGHT: (C)2010,JPO&INPIT