LAYOUT DESIGN PROGRAM, RECORDING MEDIUM HAVING THE PROGRAM RECORDED THEREIN, LAYOUT DESIGN SYSTEM, AND LAYOUT DESIGN METHOD

摘要

PPROBLEM TO BE SOLVED: To achieve regular wiring density and edge length after wiring is completed. PSOLUTION: When wiring layout is determined, maximum values of the wiring density and edge length of wiring in each of partial regions are limited. After the wiring layout, minimum values of the wiring density and edge length of each partial region are limited by inserting dummy wiring in one of the partial regions having a small wiring density. Consequently, the wiring density and edge length of each partial region can be suppressed within constant ranges and irregularities on the surface of a substrate after polished can be reduced. PCOPYRIGHT: (C)2009,JPO&INPIT