ELECTRON BEAM DRAWING DEVICE AND CURRENT DENSITY ADJUSTMENT METHOD FOR ELECTRON BEAM

摘要

PROBLEM TO BE SOLVED: To provide a device and method that can adjust the current density of an electron beam during drawing.;SOLUTION: The drawing device 100 includes: an electron gun 201 which emits an electron beam 200; an electron gun power source 230 which receives a control value and controls the electron gun 201 based upon the control value; a current density measuring section 242 which measures the current density of the electron beam 200 a plurality of times while drawing on a sample is performed; and a PID control section 244 which calculates the control value varying with the measured current density so that the current density becomes nearly constant each time the current density is measured, and outputs the control value to the electron gun power source 230 each time the control value is calculated. The current density of the electron beam can be consequently kept nearly constant during the drawing.;COPYRIGHT: (C)2009,JPO&INPIT