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TEST PRINT, TEST PRINT PRODUCTION METHOD, AND OPTICAL QUANTITY CORRECTION METHOD USING TEST PRINT

机译:使用测试打印的测试打印,测试打印生产方法和光学量校正方法

摘要

PPROBLEM TO BE SOLVED: To provide a production technique of a test print for falling down correction of an exposure unit. PSOLUTION: The test print includes a test pattern arranging a first block comprising: a region having a first density value, being a band-like region of a first scanning direction, and having first width in a second scanning direction; and a region having a second density value, being the band-like region of the first scanning direction, and having the first width in the second scanning direction, and a second block comprising: a region having the first density value, being the band-like region of the first scanning direction, and having second width in the second scanning direction; and a region having the second density value, being the band-like region of the first scanning direction, and having the second width in the second scanning direction at a prescribed rate. The test pattern includes: a reference pattern formed by regarding the first scanning direction as a main scanning direction and regarding a second direction as a sub-scanning direction; and a comparison pattern formed by a first scanning direction as the sub-scanning direction and regarding the second direction as the main scanning direction. PCOPYRIGHT: (C)2010,JPO&INPIT
机译:

要解决的问题:提供用于曝光单元的跌落校正的测试打印的生产技术。

解决方案:测试打印件包括布置第一块的测试图案,该第一块包括:具有第一浓度值的区域,该区域是第一扫描方向的带状区域,并且在第二扫描方向上具有第一宽度;以及第二块具有第二密度值,该第二密度值是第一扫描方向的带状区域,并且在第二扫描方向上具有第一宽度,第二块包括:具有第一密度值的区域,其是带第一扫描方向的类似区域,并且在第二扫描方向上具有第二宽度;具有第二浓度值的区域是第一扫描方向的带状区域,并且在第二扫描方向上以规定的比率具有第二宽度。测试图案包括:通过将第一扫描方向作为主扫描方向并且将第二方向作为副扫描方向而形成的参考图案;以及比较图案由第一扫描方向作为副扫描方向并且将第二方向作为主扫描方向形成。

版权:(C)2010,日本特许厅&INPIT

著录项

  • 公开/公告号JP2009229766A

    专利类型

  • 公开/公告日2009-10-08

    原文格式PDF

  • 申请/专利权人 NORITSU KOKI CO LTD;

    申请/专利号JP20080074664

  • 发明设计人 ISHII TOMOYUKI;GOMA TATSUJI;

    申请日2008-03-21

  • 分类号G03B27/72;H04N1/113;

  • 国家 JP

  • 入库时间 2022-08-21 19:42:43

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