首页>
外国专利>
MICROPATTERN OBSERVATION DEVICE AND MICROPATTERN CORRECTION DEVICE USING THE SAME
MICROPATTERN OBSERVATION DEVICE AND MICROPATTERN CORRECTION DEVICE USING THE SAME
展开▼
机译:微电脑观测装置和使用相同的微电脑校正装置
展开▼
页面导航
摘要
著录项
相似文献
摘要
PROBLEM TO BE SOLVED: To provide a micropattern correction device capable of obtaining an observation images free from generating unevenness.;SOLUTION: The micropattern correction device comprises: a glass surface plate 2 to mount a glass substrate 1 to be corrected; a line light 4 for irradiating the glass substrate 1 with transmitted illumination light from downward; an observation optical system 5 for observing the surface of the glass substrate 1 from upward; and cylinders 10 to 19 and pins 20 to 29 for shifting the position of the glass substrate 1 on the glass surface plate 2, when a part on the surface of the glass substrate 1 desired to be observed is positioned on the small holes 2a or lifter pin holes 2b of the glass surface plate 2. Therefore, the generation of unevenness on the observation images caused by the small holes 2a or the lifter pin holes 2b of the glass surface plate 2 can be inhibited.;COPYRIGHT: (C)2009,JPO&INPIT
展开▼