MICROPATTERN OBSERVATION DEVICE AND MICROPATTERN CORRECTION DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a micropattern correction device capable of providing an observed image, without irregularities.;SOLUTION: In this micropattern correction device, a glass surface plate 9 is divided into two sub-glass surface plates 10 and 11 movably disposed horizontally. When a lifter pin hole 22 of the sub glass surface plate 11 exists under an observation position P, the sub-glass surface plate 11 is moved to separate the lifter pin hole 22 from the observation position P. Thus, irregularities of the observation image, resulting from the lifter pin hole 22, can be eliminated.;COPYRIGHT: (C)2008,JPO&INPIT