FILM FORMATION METHOD AND FILM FORMATION APPARATUS FOR THIN FILM OF LEAD ZIRCONATE TITANATE POLYMER

摘要

PROBLEM TO BE SOLVED: To make it possible to use a PZT thin film formation method using a hydrothermal synthesis method even in the case where a complicatedly shaped or large substrate is used.;SOLUTION: The film formation method for the thin film of lead zirconate titanate polymer is one for synthesizing a lead zirconate titanate polymer by a hydrothermal synthesis thin film formation reaction comprising placing an aqueous solution 4 containing raw material ions and a base material 5 in a pressure vessel 1, heating the pressure vessel under vibration by means of an ultrasonic vibrator 3 integrally coupled with the vessel to thereby form a thin film of a lead zirconate titanate polymer on the surface of the base material by a hydrothermal synthesis thin film formation reaction between the base material and the aqueous solution.;COPYRIGHT: (C)2009,JPO&INPIT