DEVICE FOR X-RAY DIFFRACTION QUANTITATIVE DETERMINATION

摘要

PROBLEM TO BE SOLVED: To provide a device for X-ray diffraction quantitative determination, capable of performing extremely accurate calibration, by enabling acquisition of accurate diffraction line intensity information from a base plate in a quantitation method by a base reference absorption diffraction spectroscopy.;SOLUTION: The device for X-ray diffraction quantitative determination for measuring the weight of a substance S using an X ray includes a filter 33 for holding the substance S in a substance-holding region As, an X-ray source F for generating the X ray applied to the substance S, an X-ray detector 20 for detecting diffracted X rays diffracted by the substance S, the base plate 31 which is provided on the opposite side of the X-ray irradiation surface in the filter 33, and which is smaller than the substance-holding region As, and a spatial region 41 provided at an area which is the rear side of the filter 33 in relation to the X-ray source F and which is also a surrounding area of the outer peripheral side surface of the base plate 31. By providing the spatial region 41 around the base plate 31, generation of an error variation in the diffraction lines from the base plate 31 caused by the diffraction lines from a specimen plate 29C forming the spatial region 41 is prevented.;COPYRIGHT: (C)2009,JPO&INPIT