MACRO INSPECTION DEVICE, MACRO INSPECTION SYSTEM, AND MACRO INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To transfer a planar board to a macro inspection device in a short time without limiting the position and constitution of a holder concerning the macro inspection device, a macro inspection system, and a macro inspection method.;SOLUTION: The macro inspection device 1 having the holder 3 capable of changing-over an inspection angle with respect to an inspector 10 includes a board support member 2 for scooping and supporting the planar board 6. The planar board 6 is fixed to the holder 3 in a scooped state by the support member 2.;COPYRIGHT: (C)2010,JPO&INPIT