Macro inspection method and Macro Inspection System

摘要

The macro inspection apparatus includes a substrate holder for holding a substrate under test; while the substrate is illuminated by the illumination light for supporting said substrate holder; for irradiating illumination light to the substrate macro illumination optical system The blowing of air to the substrate that is passed to the substrate holder; substrate transport mechanism for transferring the substrate between said substrate holder; substrate holder drive mechanism for controlling the posture of the substrate holder substrate positioning mechanism; This a substrate positioning mechanism for positioning the reference position of the substrate holder on the substrate in the floating state by the substrate floating mechanism; By performing a substrate floating mechanism to float from the substrate holder and the substrate I comprises; substrate and fixing mechanism for fixing the substrate holder to the substrate that has been positioned by.