CONFOCAL UNIT, CONFOCAL MICROSCOPE, CONFOCAL MICROSCOPE SYSTEM, AND CONFOCAL MICROSCOPE SYSTEM CONTROL PROGRAM

摘要

PROBLEM TO BE SOLVED: To detect a uniform appropriate image without requiring strict adjustment and control for scanning.;SOLUTION: The confocal unit includes: a forming optical system on which illuminating light emitted from a light source is made incident and which forms a plurality of lines of illuminating luminous fluxes; an illuminating optical system by which the lines of illuminating luminous fluxes are optically guided to an object being inspected; a scanning section by which the object being inspected is scanned using the lines of illuminating luminous fluxes; an imaging optical system by which a luminous flux reflected from the object being inspected or fluorescent light emitted from the object being inspected is imaged; and a diaphragm which has a plurality of slit-like openings and functions as a diaphragm for the illuminating optical system and a diaphragm for the imaging optical system.;COPYRIGHT: (C)2009,JPO&INPIT