The aspect of production mannered null one side

摘要

PROBLEM TO BE SOLVED: To enable sufficient contact between an inspecting jig and a body to be inspected, by connecting one end of a metal filling to wiring, protruding the other end from an insulating film, forming the tip of the other end into the shape of a cone or column, and arranging the metal filing in the shape of a grating. ;SOLUTION: A copper foil 11 is adhered to one surface of a polyimide film 10 by an adhesive. Then a photo-resist is formed on the copper foil 11, and the copper foil 11 is patterned into a desired pattern by exposure, development, and etching to form wiring 12. Further, a through hole 14 is formed in the shape of a grating by mechanical punching. Then a copper plate 15 is glued on the wiring 12 through the use of a conductive adhesive, and electrolytic plating is performed with the copper plate 15 as an electrode. Next, by exfoliating the copper plate 15 and a dry film 13, an inspecting jig in which a metal filling 16 is formed is obtained.;COPYRIGHT: (C)1999,JPO