PULSED ELECTRON BEAM GENERATING DEVICE AND PULSED ELECTRON BEAM FILM DEPOSITION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a pulsed electron beam generating device stably operating for a long period of time, and an electron beam film deposition device using the above device.;SOLUTION: In this pulsed electron beam generating device 8 equipped with a pulsed electron beam generating part 8a to generate pulsed electron beams, and a guide tube 8b forming a hollow tube made of an insulating material, which is connected to the pulsed electron beam generating part 8a to guide the generated electron beam to a target surface, a fin 8c of an insulating material which has a height in the direction perpendicular to the longitudinal direction of the tube is provided on the side of the guide tube 8b so as to make an almost one round around the side of the guide tube.;COPYRIGHT: (C)2009,JPO&INPIT