The substrate conveyer, the pre- alignment means which the production mannered null substrate of substrate

摘要

PROBLEM TO BE SOLVED: To decrease a total time of a work for conveying and processing a plurality of substrates including its pre-alignment to improve a throughput.;SOLUTION: A handling unit 20 takes a substrate to be processed next out of a load port and delivers it to a pre-alignement unit 30 while a substrate processing device processes a plurality of semiconductor wafers 1. The unit 30 conducts a pre-alignment of a plurality of wafers 1 to be processed next while the substrate processing device processes a plurality of wafers 1. The unit 20 temporarily reserves the wafer 1 pre-aligned by the unit 30 in the load port, and conveys it from the load port to the substrate processing device.;COPYRIGHT: (C)2005,JPO&NCIPI