The multiple base materials which form the divider of the type where the device and the mannered null cassette identifying with

摘要

PROBLEM TO BE SOLVED: To avert adverse effects to an object by a method, wherein the precision in the position measurement of partition and an object as well as the reliability upon recognition by discrimination of cassette kinds are improved. ;SOLUTION: Various supporters for object discriminated by an object 3 and the displacement arrangement on a measurement plane E-E extend into measurement fluxes 11, 12 on the end side. Respective measurement fluxes 11, 12 are positioned in the region of only a single kind supporter 1. The end side of the supporter 1 is detected completely by the measurement fluxes 11, 12 on the measurement plane E-E on the extension part. This device is used for manufacturing an integrated circuit.;COPYRIGHT: (C)1999,JPO