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Ridge waveguide type semiconductor laser

机译:脊形波导型半导体激光器

摘要

PROBLEM TO BE SOLVED: To provide a ridge waveguide type semiconductor laser to provide a new laser element structure for preventing laser characteristic abnormality or the deterioration of life characteristics caused in mounting.;SOLUTION: This ridge waveguide type semiconductor laser is provided with a ridge part 14a for forming a waveguide formed in a p side semiconductor layer 14, an insulating protecting film 17 covering the p side semiconductor layer 14 so that at least a part of the ridge part top face can be exposed, a p side ohmic electrode 15 brought into contact with the ridge part exposed from that and a p side pad electrode 19 formed so as to be electrically brought into contact with the p side ohmic electrode. A diffusion preventing layer 30 for preventing the diffusion of low melting metal is formed between the p side ohmic electrode and the p side pad electrode, and at least the ridge part 14a exposed from the insulating protecting film 17 is covered with the diffusion preventing layer. Thus, the diffusion of the low melting point metal from a conductive joining agent for mounting to the ridge part can be suppressed by the diffusion preventing layer, and the ohmic contact between the p side ohmic electrode and the p type nitride semiconductor layer can be satisfactorily maintained.;COPYRIGHT: (C)2005,JPO&NCIPI
机译:要解决的问题:提供一种脊形波导型半导体激光器,以提供一种新的激光元件结构,以防止安装过程中引起的激光特性异常或寿命特性的恶化。解决方案:该脊形波导型半导体激光器设有脊形部分在用于形成形成在p侧半导体层14中的波导的图14a中,绝缘性保护膜17覆盖p侧半导体层14,使得可以暴露出脊部分顶面的至少一部分,并且与p侧欧姆电极15接触。从其露出的脊部和p侧焊盘电极19形成为与p侧欧姆电极电接触。在p侧欧姆电极与p侧焊盘电极之间形成用于防止低熔点金属扩散的扩散防止层30,从绝缘保护膜17露出的脊部14a至少被扩散防止层覆盖。因此,可以通过防扩散层抑制低熔点金属从用于安装至脊部的导电接合剂的扩散,并且可以令人满意地使p侧欧姆电极与p型氮化物半导体层之间的欧姆接触。保留版权;(C)2005,JPO&NCIPI

著录项

  • 公开/公告号JP4337520B2

    专利类型

  • 公开/公告日2009-09-30

    原文格式PDF

  • 申请/专利权人 日亜化学工業株式会社;

    申请/专利号JP20030394474

  • 发明设计人 松村 拓明;

    申请日2003-11-25

  • 分类号H01S5/022;H01L21/28;H01S5/323;

  • 国家 JP

  • 入库时间 2022-08-21 19:39:36

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