X-ray fluorescence spectrometer with background correction method and method of the fluorescent X-ray analyzer

摘要

PROBLEM TO BE SOLVED: To provide a background correction method for a fluorescent X-ray analyzer reducing coexisting element effects and accurately and quantitatively analyzing a low-concentration sample in a fluorescent X-ray analyzer. ;SOLUTION: In a fluorescent X-ray analyzer obtaining the concentration of a measurement object components in a sample using an X-ray intensity ratio of a fluorescent X-ray intensity S to a scattering X-ray intensity B measured by an X-ray detector 5 in irradiating an X-ray 2 to the sample 3, and a calibration curve C obtained using a standard sample, the calibration curve C is found by the X-ray intensity ratio R=(S-b)/B using a value S-b found by subtracting the background (b) caused by the device except for the sample from the measurement value S of the fluorescent X-ray intensity as the fluorescent X-ray intensity for measuring the X-ray intensity ratio R so that the concentration of the measurement object component in the sample 3 is provided.;COPYRIGHT: (C)2001,JPO