Measurement of overlay and the profile asymmetry which use the symmetry and the antisymmetric sukiyatorometori signal

摘要

SolutionsMaking use of eripusometori constitution, the system and method in order to measure the part Mueller queue and complete Jones queue of the system which is isotropy or anisotropy are disclosed. With one execution form, the signal of 2 or more (as for each always does not satisfy the hypothesis of symmetry), is synthesized to the synthetic signal which satisfies the hypothesis of symmetry. The individual signal is collected with the analyzer angle of 2 or more. Symmetry of the synthetic signal tries to be able to execute the extraction of information of overlay simply concerning the target which includes the general 2D diffraction grating concerning the optional relative bearing of the incident ray for the 1D diffraction grating target, and. Also the signal which possesses a certain symmetry, makes that very efficiently it measures profile asymmetry possible. With another execution form, measuring method in order to measure only the signal which satisfies the hypothesis of symmetry is stipulated. Option execution form has one polarized light element which functioning is done as a polarizer and an analyzer. Another option execution form two polarized light components of reflected light condenses simultaneously making use of the inspection optical prism. Selective figure Figure 2A