Supplying electricity to the catalytic converter body which is laid out in terminus method of detection and inside the gaseous phase reaction central processing unit null

摘要

PROBLEM TO BE SOLVED: To provide an end point detecting apparatus of peeling processing in a phase reaction processing apparatus.;SOLUTION: In the end point detecting method, a catalyst 9 arranged in a processing chamber is supplied with power and is heated at high temperature, and a reaction gas is decomposed by the heated catalyst 9 to perform processing. This method has a process of supplying power to the catalyst 9 from a constant current source 10, a process of detecting a difference in potential between both ends of the catalyst 9, a process of performing primary differential of the detected potential difference, and a process of determining an end point of processing based on the acquired primary differential value.;COPYRIGHT: (C)2007,JPO&INPIT