The acoustic signal reception and/or method in order to produce the micro machining structure and the micro machining structure in order to occur, and applications of the micro machining structure

摘要

Method in order to produce the micro machining structure and the micro machining structure and applications of the micro machining structure are proposed. Inside the medium which surrounds the micro machining structure at least partly, reception and/or the micro machining structure in order to occur has been stipulated the acoustic signal. In this case, this micro machining structure, forms the 1st aspect of the said micro machining structure substantially having had the 1st opposition element which, 1st opening to be provided in the said 1st opposition element, the micro machining structure, forms the 2nd aspect of the said micro machining structure substantially having had the 2nd opposition element which, 2nd opening to be provided in the said 2nd opposition element, the micro machining structure, with the aforementioned 1st opposition element and the aforementioned 2nd opposition elementIt has possessed the diaphragm which is arranged, is closed substantially.