Micromechanical Structure for Receiving and/or Generating Acoustic Signals, Method for Producing a Micromechnical Structure, and Use of a Micromechanical Structure

摘要

A micromechanical structure and a method for producing a micromechanical structure are provided, the micromechanical structure being configured for receiving and/or generating acoustic signals in a medium at least partially surrounding the structure. The structure includes a first counterelement that has first openings and essentially forms a first side of the structure, a second counterelement that has second openings and essentially forms a second side of the structure, and an essentially closed diaphragm disposed between the first counterelement and the second counterelement.