Being the spatter accumulation system of the cathode material in order with continual accumulation null continuous control action mode of the insulating material which

摘要

(57) Abstract The baseplate (3) method and the device which do the spatter accumulation of the insulating material on, are disclosed with continuous action mode. In order to make this possible, the new design of the anode assembly and drive power source is disclosed. Single unit or it can use the many anode (11 and 12). The anode, in order to offer the pure correct anode to the system, in order what insulating material which has the possibility of being accumulated on the anode spatter to be able to be removed, can be biased by negative number to every specified time, vis-a-vis the plasma (2). The anode is just biased, in order to carry out role as an anode, between some times, at least. This way, when anode structure is just biased by removing every insulating material which has the possibility of being formed on anode structure, in electronic collection from the plasma, continuing anode structure, it becomes possible to use effectively, therefore, as the anode of the system, continuing anode structure, it becomes possible to use effectively, continuous action of the system becomes possible with that.