PROBLEM TO BE SOLVED: To provide a cold trap materializing low electric power consumption and high speed exhaust while increasing adsorption capacity, and an evacuation device using the cold trap having such benefits and a turbo molecular pump together.;SOLUTION: The cold panel 12 has an outer circumference panel 12a and an inner circumference panel 12b which are wave shape cylinder bodies of which sections have unevenness along a radial direction coaxially arranged. Consequently, since surface area of a trap surface of the cold panel for freezing and collecting water molecule is enlarged, adsorption capacity is increased, and since surface are is enlarged without opposing to a gas flow passage direction, low electric power consumption and high speed exhaust are materialized together in the cold trap 10. The evacuation device has the turbo molecular pump arranged in a downstream of the cold trap 10.;COPYRIGHT: (C)2005,JPO&NCIPI
展开▼
