PROBLEM TO BE SOLVED: To provide a cold trap, reducing power consumption due to entering of heat by inhibiting entering of heat to a cold panel, and reducing the running cost, and an evacuation device, jointly using a turbo molecular pump with the cold trap having such advantages.;SOLUTION: In a cold trap 100, a shield part 13 is installed between a casing 11 and the cold panel 12, heat radiation from the casing 11, the temperature of which is the temperature substantially equal to the ordinary temperature of external environment, interrupted by the shield part 13, whereby heating value entering the cold panel 12 is reduced to improve the refrigerating efficiency of the cold panel 12. In this evacuation device 1000, the turbo molecular pump 200 is disposed downstream from the cold trap 100.;COPYRIGHT: (C)2005,JPO&NCIPI
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