PROBLEM TO BE SOLVED: To provide a cold trap in which small amount of electrical power is consumed by achieving both of increase in the adsorption capacity and a high-speed exhaust, and a vacuum pumping system in which a turbo-molecular pump is used combinedly with the cold trap having such advantages.;SOLUTION: The cold trap 10 comprises a cold panel 200 installed in the space of a vacuum chamber 20, and a refrigerator 100 with its cooling end thermally connected in the inside space of the vacuum chamber 20 to the cold panel 200. In the vacuum pumping system 1000, the turbo-molecular pump 30 is connected through a pipe 40 into the vacuum chamber 20 provided with the cold trap 10.;COPYRIGHT: (C)2006,JPO&NCIPI
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