While amendment the non dot every other difference which the light condensing performance evaluation device which evaluates the light condensing performance of the optical

摘要

PROBLEM TO BE SOLVED: To provide an astigmatic difference measuring method of an optical device which can correct astigmatism present on a condensing performance evaluation system itself, without the use any optical elements for astigmatism correction to contribute to reduction in the number of components and cost required for astigmatic difference measuring of the optical device.;SOLUTION: This astigmatism measuring method uses software-based data processing to correct astigmatism, without relying on any optical element for astigmatism correction, and then measures astigmatic difference of the optical device.;COPYRIGHT: (C)2006,JPO&NCIPI