Production method of high purity Al membrane formation material, production device of high purity Al membrane formation material, high purity Al membrane formation material, and Al membrane

摘要

PROBLEM TO BE SOLVED: To provide an oxygen (O) content-reduced Al compound expressed by H₃Al:L_k [in the general formula, k is 1 or 2, and L is organic amine].;SOLUTION: In the production device, the raw material of an Al compound expressed by the general formula of H₃Al:L_k [wherein, k is 1 or 2, and L is organic amine] is allowed to react to produce an Al compound expressed by the general formula of H₃Al:L_k. The production device is provided with: a reaction apparatus in a synthetic reaction stage; a solid matter removal apparatus in a solid matter removal stage after the synthetic reaction stage; and a distillation apparatus in a distillation stage after the synthetic reaction stage. The parts in contact with the Al compound expressed by the general formula H₃Al:L_k in the reaction apparatus, the solid matter removal apparatus and the distillation apparatus are made of metal. Also, the coupling part between the reaction apparatus and the solid matter removal apparatus and the coupling part between the solid matter removal apparatus and the distillation apparatus are provided with metallic packing.;COPYRIGHT: (C)2005,JPO&NCIPI