QCM sensor and QCM sensor device

摘要

PROBLEM TO BE SOLVED: To easily measure a plurality of resonance frequencies, by reducing the number of wires for connecting a plurality of vibrators and an admittance measuring means for measuring a resonance frequency in a multi-channel QCM sensor device.;SOLUTION: The resonance frequency of a plurality of quartz resonators for composing the multi-channel QCM sensor device is set to frequencies that mutually differ. The plurality of quartz resonators are connected in parallel; the combined admittance is measured by an admittance measuring means; and all equivalent circuit constants of the plurality of quartz resonators are obtained from the combined admittance characteristics by the method of least square. Changes in the resonance frequency are obtained, and the mass of a substance adhering to a piezoelectric vibrator is measured.;COPYRIGHT: (C)2005,JPO&NCIPI