QCM A POSITION SENSOR MODULE FOR LOCATING QCM SENSOR IN A DEPOSITED FILM MEASURING DEVICE

摘要

The present invention relates to a position sensor module used to determine abnormality during a deposition process in a deposited film thickness measuring device used for a semiconductor depositing process. According to an embodiment of the present invention, a position sensor module for detecting the position of a QCM sensor in a deposited film thickness measuring device includes: a disk-shaped carousel having a plurality of QCM sensors in a radial shape; an upper cover covering the carousel and having a single window on one side of an upper surface so that one of the plurality of QCM sensors is exposed to the outside; and a rotation shaft unit rotating the carousel. The position sensor module for detecting the position of a QCM sensor in a deposited film thickness measuring device includes: a QCM sensor position flag coupled to the rotation shaft unit and rotating and moving by corresponding to a rotation movement of each QCM sensor; and a position sensor fixed to one side of the QCM sensor position flag and measuring whether the QCM sensor and a window are matched by detecting a moved position of the QCM sensor position flag.