MULTI-CHANNEL QCM SENSOR DEVICE AND MULTI-CHANNEL QCM MEASURING SYSTEM

摘要

PROBLEM TO BE SOLVED: To obtain a multi-channel QCM measuring system capable of reducing the number of measuring circuits or simplifying a switching connecting circuit necessary for the switching and connection between a multi-channel QCM sensor device and an electric characteristic measuring circuit.;SOLUTION: In electrodes to be arranged on the surface of a crystal substrate 41, electrodes 42A1, 42A4 and 42A7 are, for example, derived to one terminal part 441 by an electrode lead part 431. In electrodes to be arranged on the back surface, electrodes 42B7, 42B8, and 42B9 are, for example, derived to one terminal part 463 by an electrode lead part 435. A measuring system using this sensor device is provided with a measuring-cell constitution to connect terminal parts 441-443 lead from the electrodes arranged on the surface of the crystal substrate and terminal parts 461-463 derived from the electrodes arranged on the back surface to separate oscillating circuits, etc., or sequentially switching among them and connecting to one oscillating circuit, etc.;COPYRIGHT: (C)2000,JPO