Secondary electron emission ratio measurement equipment

摘要

Being cheap, it offers the small-sized secondary electron emission ratio measurement equipment. The secondary electron emission ratio measurement equipment which relates to this invention provides the cylindrical electrode for the tubular electrode and that central frame which possess the open part in apex, and makes the charged particle formation source and the charged particle beam focus in order to form the charged particle with the glow discharge plasma decompressing inside the secondary electronic test section and the vacuum chamber which have the small-sized secondary electronic measurement unit which consists of the secondary electronic collector section in order to capture the secondary electron which is discharged from the electrostatic lens and the suffering measurement substance in order to irradiate to suffering measurement ones and the sample retention section which keeps suffering measurement ones inside the vacuum chamberThe vapor supply section and the charged particle formation source which supply the gas which in the vapor exhaust section and the charged particle formation source which are done becomes the charged particle, it impresses voltage in the electrostatic lens, and the secondary electronic collector electrode the voltage impression section and the amperometry section which measure electric current and, it controls these, the control computer which calculates secondary electron emission ratio, the empty it is constituted.