Connection method and connecting device of the device fabrication process between devices, programs, device manufacturing processing system, exposure apparatus and method, as well as measurement and inspection method measurement and inspection equipment

摘要

Communication server (20), to connect the device manufacturing process between devices (14a, 14b, 16) such as various inspection equipment (13) and exposure apparatus. The communication server (20) converts the communication protocol message conversion unit for converting (53a), a communication message file format conversion section for converting the format of data transmitted by the device manufacturing process between devices, and (53b), It is a communication protocol conversion unit (53c), receives so as to adapt the device fabrication process equipment of the sender, the information transmitted from the source, and is adapted to the device manufacturing process apparatus at the transmission destination information received I send Te.