Film forming method of the magneto-optical recording medium, and apparatus for manufacturing a magneto-optical recording medium

摘要

Is disposed opposite the optical disk substrate to target including carried into the vacuum chamber and the optical disc substrate (a) step, a film-forming material disposed in the vacuum chamber the film forming method of the optical disk according to the present invention, the step (b), When provided to form a predetermined film by a sputtering method using a target, which is fixed on an optical disk substrate or to revolve or rotate the step (c), and D is a radius a, the optical disk substrate radius of the target, I satisfy the relationship a 2D. With this configuration, film forming homogeneous, the optical disk corresponding to high density can be achieved.