Production manner of thin film formation manner and the production device and semiconductor equipment of the thin film structure which uses this, and production manner of the electro-optic device

摘要

To reduction manufacturing cost by decreasing the futile use of a coating liquid and to improve in-plane uniformity of a thin film and the sharpness of contour in a method of forming the thin film by applying a coating liquid ON a substrate. SOLUTION: The thin film forming method has a process for forming a bank part 21 ON a contour part in a region where the thin film is formed ON the substrate S by discharging a 1st coating liquid by ink-jet method and a process for discharging a 2n coating liquid containing film forming components which has nearly the same composition as the 1st coating liquid ON a pond part 23 surrounded by the bank part 21 by the ink-jet method.