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Sputtering apparatus and method of manufacturing flat display device using the sputtering apparatus
Sputtering apparatus and method of manufacturing flat display device using the sputtering apparatus
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机译:溅射装置及使用该溅射装置的平面显示装置的制造方法
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摘要
Provided is a sputtering apparatus which can check a short-circuit of a mask during a non-discharge period, the sputtering apparatus including: a substrate support, which is installed inside a chamber and supports a substrate; a target, which includes a target material that is to be deposited on the substrate; a mask, which is spaced apart from the substrate so as to surround the peripheral part of the substrate; a shield, which supports the mask and is connected to ground; an insulating member, which combines the mask and the shield and includes an insulating material; and a short-circuit detecting apparatus for detecting a short-circuit of the mask during a non-discharge period of the sputtering apparatus.
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