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METHOD FOR CRYSTALLIZATION OF AMORPHOUS SILICON BY JOULE HEATING
METHOD FOR CRYSTALLIZATION OF AMORPHOUS SILICON BY JOULE HEATING
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机译:焦耳加热结晶非晶硅的方法
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摘要
The present invention provides a method for preparation of crystallization of amorphous silicon thin film, which comprises providing a forming a amorphous silicon on a dielectric film formed on a transparent substrate; then forming a conductive layer on the top surface of substrate; applying an electric field to the conductive layer so as to generate heat; and crystallization of amorphous silicon thin film by the generated heat.
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