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SYSTEM, METHODS AND APPARATUS FOR SUBSTRATE CARRIER CONTENT VERIFICATION USING A MATERIAL HANDLING SYSTEM
SYSTEM, METHODS AND APPARATUS FOR SUBSTRATE CARRIER CONTENT VERIFICATION USING A MATERIAL HANDLING SYSTEM
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机译:使用材料处理系统验证基质载体含量的系统,方法和装置
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摘要
Methods and systems are provided for mapping substrates in a substrate carrier. The invention includes a substrate carrier including one or more windows; and an imaging system coupled to a substrate carrier handling robot and adapted to determine or image substrate positions in the substrate carrier via the one or more windows. Numerous other aspects are provided.
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