Vibration isolating apparatus, control method for vibration isolating apparatus, and exposure apparatus

摘要

An active vibration isolating apparatus can perform vibration isolation with high precision and fast response speed using a gas damper. A vibration isolating apparatus comprises an air damper that uses air supplied from a compressed air source to support a structure on an installation surface; a servo valve that controls the flow rate of the air that is supplied from the compressed air source to the air damper; a position sensor that measures a position provided to the structure by the air damper; and a vibration isolating block control system that controls the flow rate of the air at the servo valve based on the measurement value of the position sensor.