DEBRIS MINIMIZATION AND IMPROVED SPATIAL RESOLUTION IN PULSED LASER ABLATION OF MATERIALS

摘要

A method of minimizing the deposition of debris onto a sample being ablated. The method comprises: 1) reducing a laser pulse energy to approximately a threshold level for ablation; 2) focusing the energy using an immersion object lens having a final element and 3) ablating a region of the sample using a multitude of laser pulses, each pulse being sufficiently separated in time to reduce a concentration of ablation products in a gas phase.