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Debris minimization and improved spatial resolution in pulsed laser ablation of materials
Debris minimization and improved spatial resolution in pulsed laser ablation of materials
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机译:脉冲激光烧蚀材料中的碎屑最小化并提高了空间分辨率
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摘要
A method and an apparatus of minimizing the deposition of debris onto a sample being ablated. The method comprising the steps of: 1) reducing a laser pulse energy to approximately a threshold level for ablation; and 2) ablating a region of the sample using a multitude of laser pulses, each pulse being sufficiently separated in time to reduce a concentration of ablation products in a gas phase. An apparatus for ablating a region of a sample with a laser beam. The apparatus comprises: 1) a source providing a pulsed laser beam of a certain energy, the source focusing the laser beam on the sample to ablate a region of the sample; and 2) a device for providing a flowing fluid over the region being ablated to remove the ablation products.
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