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INTEGRALLY FABRICATED MICROMACHINE AND LOGIC ELEMENTS
INTEGRALLY FABRICATED MICROMACHINE AND LOGIC ELEMENTS
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机译:集成式微型计算机和逻辑元素
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摘要
Embodiments of the invention are related to micromachine structures. In one embodiment, a micromachine structure comprises a first electrode, a second electrode, and a sensing element. The sensing element is mechanically movable and is disposed intermediate the first and second electrodes and adapted to oscillate between the first and second electrodes. Further, the sensing element comprises a FinFET structure having a height and a width, the height being greater than the width.
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