Electronic Device Testing Apparatus and Temperature Control Method in an Electronic Device Testing Apparatus

摘要

An electronic device testing apparatus 1 comprising a temperature measurement device 51 for measuring a temperature of an IC device D based on a voltage of a thermal diode provided inside the IC device D, a temperature sensor 154 and a temperature applying device 153 provided to a pusher 150, and a calibration means for calculating a correction value from a difference of a measurement temperature of a predetermined IC device D by the temperature measurement device 51 and that by the temperature sensor 154; wherein a temperature of the IC device D to be tested is measured by the temperature measurement device 51 at an actual operation, and the temperature applying device 153 is controlled based on the obtained measurement temperature and a correction value calculated by the calibration means.