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Microstructure with Enlarged Mass and Electrode Area for Kinetic to Electrical Energy Conversion
Microstructure with Enlarged Mass and Electrode Area for Kinetic to Electrical Energy Conversion
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机译:质量和电极面积增大的微结构,用于动能到电能的转换
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摘要
A microstructure has a substrate, a fixed electrode having a plurality of fixed fingers fixed to the substrate, a movable electrode having a body (28) and a plurality of fingers (22) extending from the body, the movable electrode being movable relative to the fixed fingers to vary a capacitance of the electrodes. The fixed fingers (21) extend in a first plane parallel to a main surface of the substrate, wherein the body of the movable electrode extends in a second plane adjacent to the first plane so that the body faces at least some of the plurality of fixed fingers. Such vertical integration can help enable such devices to be made more compact.
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